Hitachi High-Tech Develops the Electron Beam Area Inspection System GS1000 to Meet Increased Demand for Inspection and Massive-Metrology in EUV Applications

Hitachi High-Tech Corporation ("Hitachi High-Tech") today announced the Development of its Electron Beam Area Inspection System GS1000. This, newly developed tool, offers precise and fast e-beam inspection by using common platform, which is based on proven Hitachi High-Tech's high-speed inspection SEM's, Hitachi High-Tech's expertise in market leading CD-SEM*1 technology, and high-speed and massive measurements.